A Practical OEM Checklist for Specifying a Mica Heating Plate
https://industrial-heater-lab.cloudhinter.com/posts/how-to-select-a-mica-heater-for-industrial-heating-applications
In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry